Semiconductor industry

Small size ion sputter coater

MD-FXY12
产品描述：sputter coater
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Product Description

This instrument is mainly used for scanning electron microscope coating conductive film (gold film), the instrument is simple and convenient to operate, is the necessary instrument for sample preparation with small and medium scanning electron microscopes.

Main uses: gold, platinum, silver, titanium, aluminum plasma sputtering.

Application

Scanning electron microscope sample surface treatment

Main uses: gold, platinum, silver, titanium, aluminum plasma sputtering.

Technical Data

Model	MD-FXY12 Small size ion sputter coater
Vacuum Chamber	Ф100mm*H130mm
Specimen stage	Ф40mm(6 sample cells at the same time)
Gold sputtering target	Ф57mm
Vacuum gauge	Pirani
Vacuum pump	Rotation vane pums: 2L / s
Vacuum protection point	20Pa
Working gas	Air or Ar with micro adjustable
Sputtering voltage	1.6KV
Net weight	20kg+40kg
Compliance	CE