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Semiconductor industry

  • Small size ion sputter coater
Small size ion sputter coater

Small size ion sputter coater

  • MD-FXY12
  • Product description: sputter coater
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Product Description

This instrument is mainly used for scanning electron microscope coating conductive film (gold film), the instrument is simple and convenient to operate, is the necessary instrument for sample preparation with small and medium scanning electron microscopes.

Main uses: gold, platinum, silver, titanium, aluminum plasma sputtering.

Application

Scanning electron microscope sample surface treatment

Main uses: gold, platinum, silver, titanium, aluminum plasma sputtering.

Technical Data

Model

MD-FXY12 Small size ion sputter coater

Vacuum Chamber

Ф100mm*H130mm

Specimen stage

Ф40mm(6 sample cells at the same time)

Gold sputtering target

Ф57mm

Vacuum gauge

Pirani

Vacuum pump

Rotation vane pums: 2L / s

Vacuum protection point

20Pa

Working gas

Air or Ar with micro adjustable

Sputtering voltage

1.6KV

Net weight

20kg+40kg

Compliance

CE

Instrument configuration

MD-FXY12 host

1 set

Mechanical pump

1 set

pump-line

1